搜索 - 科创

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3.1 对薄膜表面形貌的影响　　N2的引入会明显降低金刚石薄膜的晶粒尺寸，其原因是N2的引入会有利于提高CH3基团的浓度，导致金刚石薄膜生长中的二次形核现象增加，从而降低晶粒尺寸;而且在薄膜形成过程中形成了一些

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