搜索 - 科创

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在工业生产中，经常需要准确的控制气体的流量。例如半导体的气相扩散、蚀刻、溅射、注入等，都需要在真空环境中，定量的输入特种气体。气体的输入量就需要使用质量流量控制器（Mass Flow Controll...

气体微流量测量与控制一直以来是高端制造业的重要核心技术之一，而这一核心技术领域的核心传感器和控制零部件就是今天我们要集中讨论的气体质量流量计与气体质量流量控制器。1.

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